发明名称 MANUFACTURING METHOD AND MANUFACTURING DEVICE OF PROBE CARRIER
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method and a manufacturing device of a probe carrier capable of producing stably the probe carrier without overflowing probe solution from a reservoir for holding probe material, when manufacturing the probe carrier by using a liquid discharging device. SOLUTION: In this manufacturing method of the probe carrier, plural kinds of probe solutions containing the probe material specifically bondable to target material is discharged onto a substrate from the liquid discharge device, to thereby arrange each of plural kinds of probes on the substrate. The method is characterized by discharging the probe solution onto the substrate from the liquid discharging device, while moving the substrate relative to the liquid discharging device.
申请公布号 JP2002372535(A) 申请公布日期 2002.12.26
申请号 JP20020093021 申请日期 2002.03.28
申请人 CANON INC 发明人 WATANABE HIDENORI;OKAMOTO HISASHI;MIHASHI NAOTO
分类号 G01N31/22;C12M1/00;C12N15/09;G01N1/00;G01N1/28;G01N33/53;G01N37/00;(IPC1-7):G01N33/53 主分类号 G01N31/22
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