| 摘要 |
PROBLEM TO BE SOLVED: To improve the durability of an actuator and suppress the consumption of pressure fluid by reducing an impact force against a cushion mechanism at a stroke terminal under the action of the actuator. SOLUTION: Chambers 12a, 12b of a cylinder 12 communicate with a first supply and exhaust means 15 and a second supply and exhaust means 17, respectively. The first supply and exhaust means 15 is connected to a pressure fluid supply source 16, and the second supply and exhaust means 17 is connected to the pressure fluid supply source 16 through a pressure reducing valve 19 and is connected to a third supply and exhaust means 18 communicating with the pressure fluid supply source 16. Pressurization, pressure reduction, and air exhaust acting on the chambers 12a, 12b of the cylinder 12 are performed by the operations of the first to the third supply and exhaust means 15, 17, 18. The control of the first to the third supply and exhaust means 15, 17, 18 is performed by turning on and off signals of a control circuit 20. Furthermore, the operation conditions of the cylinder 12 are set to a setting switch 21 for supplying a signal to the control circuit 20.
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