| 摘要 |
1,098,289. Refrigerating. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. March 3, 1966 [March 6, 1965], No. 9331/66. Heading F4H. [Also in Division F1] Evacuation of a chamber 1, Fig. 1, containing an article under treatment, e.g. evaporationdeposition of a thin layer on the article or extraction of a volatile component therefrom is effected by a conventional fore pump 2 and by condensing residual gas on the surface of a coil 3 traversed by cold liquefied gas, e.g. nitrogen supplied from a container 6 through a valvecontrolled duct 4; the condensate being subsequently vaporized by heating the coil 3, e.g. by passing of an electric current therethrough. Nitrogen vapour and liquid may be vented to atmosphere through an outlet 7 or the mixture may be separated at 10, Fig. 3, and the liquid nitrogen returned by a pump 11 to the container 6 which is supplied from a conventional air fractionating column 14. |
