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发明名称
Method and System for Manufacturing III-V Group Compound Semiconductors
摘要
申请公布号
GB2376694(A)
申请公布日期
2002.12.24
申请号
GB20020011148
申请日期
2002.05.15
申请人
* SUMITOMO CHEMICAL COMPANY, LIMITED
发明人
TOSHIHISA * KATAMINE;YASUSHI * IYECHIKA;TOMOYUKI * TAKADA;YOSHIHIKO * TSUCHIDA;MASAYA * SHIMIZU
分类号
H01L21/20;C23C16/44;C23C16/455;C30B25/14;C30B29/40;(IPC1-7):C23C16/455
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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