| 摘要 |
A method and an apparatus for producing a solid actuator employing measurement of the electric characteristic of the actuator and effecting polarization during the wire bonding process. After a wire has been bonded to pads formed on a substrate, the conduction of the wire is tested. Then, whether or not a capacitance between the pads has a preselected value is determined. Subsequently, whether or not a characteristic impedance between the pads has a preselected value is determined. Thereafter, whether or not any crack is present in the surfaces of electrodes electrically connected to the pads is determined. This is followed by the polarization of the substrate. Electrical characteristics are tested after each wire is bonded. There is also provided a storage medium storing a program for controlling the above apparatus.
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