发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To lay separate circuit elements of a semiconductor device and wirings on an upper layer, without giving the potential influence on lower layer circuit elements through capacitance coupling. SOLUTION: A shielding electrode 32 connected to ground is disposed between a capacitor 8 formed on a silicon substrate 1 and a thin film resistance 13 formed so as to overlap with a capacitor 8 forming region.
申请公布号 JP2002368100(A) 申请公布日期 2002.12.20
申请号 JP20010168270 申请日期 2001.06.04
申请人 DENSO CORP 发明人 SHIRAKI SATOSHI;TAKAHASHI SHIGEKI
分类号 H01L23/52;H01L21/3205;H01L21/822;H01L27/04;(IPC1-7):H01L21/822;H01L21/320 主分类号 H01L23/52
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