| 摘要 |
PROBLEM TO BE SOLVED: To prevent dust from sticking on an optical component and to prolong the life of the optical component. SOLUTION: This gas laser oscillation device is equipped with a circulation path 5 for circulating a laser medium, a blower for laser medium circulation which is provided in the circulation path 5, an electrode 2 for discharge which forms a discharge space in the circulation path 5, a power source which causes the electrode 2 for discharge to discharge, and an optical resonator which emits laser light by placing the laser medium excited by passing through the discharge space in a resonance state. Further the device is provided with a power source 6 which electrostatically charge the optical component 4 constituting the optical resonator. When the high-frequency power source 3 causes discharge to the electrode 2, dust having passed through the discharge space is electrostatically charged (+). The optical component is electrostatically charged (+) by a DC power source 6, so the dust does not stick on the optical component 4 because of a Coulomb force and a decrease in laser output and thermal breakdown of the optical component can be prevented.
|
