| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an aligner and an adjusting method therefor wherein lens distortion accuracy, pattern matching accuracy, and the like are enhanced, by making optimal adjustment using linear programming. SOLUTION: The aligner and the adjusting method therefor involve a computing means using linear programming wherein the threshold value of an error after adjustment is expressed as a dummy variable irrelevant to the amount of adjustment, and a target function to be minimized is the dummy variable; and an amount of adjustment correcting means for which an amount of adjustment is determined by the computing means. The dummy variable irrelevant thereto is taken as the threshold value of an error after adjustment (Step S101), and the amount of adjustment for an object to be adjusted is determined by linear programming wherein a target function to be minimized is the dummy variable (Step S105).</p> |
