CHARGED-PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a compact charged-particle beam device having high resolution and high detection efficiency. SOLUTION: In the charged-particle beam device, the aberration of a primary electron beam 102 generated by a first E×B type filter 17 which operates to deflect secondary electrons 103 in the direction of a detector 16 can be corrected using a second E×B type filter 18 without the need to position the first and second E×B type filters between objective planes or image planes of the same lens. The charged-particle beam device has the effect of achieving correction of the aberrations of the E×B filters using an electronic optical system having a short optical path length.