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发明名称
Apparatus for impedance measurement through the use of electron beam probes
摘要
申请公布号
US3315157(A)
申请公布日期
1967.04.18
申请号
US19630323489
申请日期
1963.11.13
申请人
KABUSHIKI KAISHA HITACHI SEISAKUSHO
发明人
WATANABE HIROSHI;MUNAKATA CHUSUKE
分类号
G01R27/02;H01J37/26
主分类号
G01R27/02
代理机构
代理人
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