MANUFACTURING DEVICE FOR ELECTRON SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing device for electron source capable of eliminating shortage of organic substance on the way of the activating process conducted in the manufacture of an electron emitting element and electron source and of establishing a sufficient activation while the electron emitting characteristics are well maintained. SOLUTION: The manufacturing device is to manufacture an electron source furnished with a plurality of electron emitting elements each consisting of an electroconductive film including an electron emission part 5 formed between a pair of element electrodes 2 and 3 confronting on a substrate 61, in which an activating process is executed to deposit carbon or carbon compound 6 on the electron emission part 5, in such a manner that a plurality of vacuum vessels having different atmospheres are provided and the process is executed in them one after another.