INSPECTION DEVICE AND INSPECTION METHOD FOR OPTOELECTRONIC DEVICE AND MANUFACTURING METHOD FOR THE SAME DEVICE

摘要

PROBLEM TO BE SOLVED: To perform a highly accurate inspection and a high accurate adjustment by receiving efficiently a reflected light by a liquid crystal layer in the manufacturing process of an optoelectronic device such as a reflection type liquid crystal device. SOLUTION: In this device and method, a polarized light (Li) having a prescribed state is irradiated to an electro-optic panel (10) as an illuminating light for inspection. This polarized light is reflected by the surfaces (10b) of substrates constituting the electro-optic panel and also is transmitted through the substrates and is reflected also by an electro-optic material layer (10a). These reflected rays of light (Lr) reach a separating means (26) and rays of light (L1, L2) reflected by the substrates are interrupted by the separating means (26) and the light (L3) reflected by the electro-optic material layer passes through the means 26. When the light passed through the means 26 is received, a detection signal corresponding to the light is outputted and the inspection and the adjustment are performed in this device and method.