| 摘要 |
PROBLEM TO BE SOLVED: To provide a work carrier in which the static charged state of a larger number of works can be detected efficiently and accurately using a small number of measuring instruments without limiting the object of measurement directly to a work, e.g. a liquid crystal substrate. SOLUTION: The liquid crystal substrate carrier 2 for receiving a liquid crystal substrate 1 and transferring it to an other place comprises an arm 3 for mounting and holding the liquid crystal substrate, and means 4, 6, 11 and 13 for detecting charged state of the liquid crystal substrate by measuring at least either one of the quantity of charges or the potential being induced on the arm 3. |
