发明名称 SEMICONDUCTOR DEVICE FOR POWER
摘要 PROBLEM TO BE SOLVED: To reduce the ON-resistance per chip area of a lateral power MOSFET. SOLUTION: In this lateral power MOSFET, a low-resistance punched conductive area is provided from the surface of a semiconductor, within a p-type semiconductor region on a low-resistance p-type semiconductor wafer connected with an external source electrode to the p-type semiconductor region, at least two n-type drain regions which are electrically connected with a drain electrode are formed in the semiconductor region sandwiched between the low-resistance punched conductive regions, and an external drain region is provided on an active region.
申请公布号 JP2002368121(A) 申请公布日期 2002.12.20
申请号 JP20010167561 申请日期 2001.06.04
申请人 HITACHI LTD 发明人 SAKAMOTO MITSUZO;YANOKURA EIJI;SHIRAISHI MASAKI;IWASAKI TAKAYUKI
分类号 H01L21/3205;H01L21/822;H01L21/8234;H01L23/495;H01L23/52;H01L25/07;H01L25/18;H01L27/04;H01L27/088;H01L27/092;H01L29/06;H01L29/41;H01L29/417;H01L29/423;H01L29/45;H01L29/78;H03K17/06;H03K17/687 主分类号 H01L21/3205
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