DEVICE FOR PROCESSING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To move up and down a boat without using a screwed electric jack. SOLUTION: This device has a process tube 14 in which a processing chamber 14a for processing a wafer W supported with a boat 18, a seal cap 19 for supporting and carrying the boat 18 into the processing chamber 14a and sealing the processing chamber 14a, and a load lock chamber 4 in which a waiting chamber 3 is formed where the boat 18 waits. The seal cap 19 is connected to the chamber 4 by a bellows 21 for hermetically sealing the waiting chamber 3 and the other end of a wire 26 retained by the seal cap 19 is retained by a drum 25 rotated by a motor 24. A pressure difference between as pressure in the waiting chamber 3 evacuated to a vacuum and an atmospheric pressure in a hollow portion of the bellows 21 moves up and down the boat 18 and a moving speed is controlled by adjusting a speed of unreeling/reeling the wire 26. Moving up and down the boat by the pressure difference between the inside and the outside of the bellows eliminates the use of screwed electric jack and thus reduces the whole length of a CVD device and its manufacturing cost.