| 摘要 |
PROBLEM TO BE SOLVED: To reduce manhours of a process for a capacitor by making it possible to use a material like Cu having diffusibility into an insulating film, as a lower electrode or an upper electrode in the capacitor. SOLUTION: In the capacitor, in which at least one of upper or lower electrodes is made of conductive material having a tendency toward dispersion, the voltage applied to the electrode made of material with diffusibility is made negative or almost the same as the voltage applied to the other electrode, or the DC component of an AC voltage signal applied to the electrode made of material with diffusibility is made negative or almost the same as the voltage applied to the DC component of the other electrode. In addition to this way, the frequency of the applied AC voltage a signal is made 0.1 [Hz] or larger.
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