METHOD OF POSITIONING AND INSPECTING TREATMENT PART IN SEMICONDUCTOR TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a positioning method in which the positional relationship between a driving shaft, the tip of a needle and a part to be discharged can be obtained with satisfactory presision and to provide a method in which the mounting presision of a dispenser or the needle is digitized and inspected individually. SOLUTION: By a first fixed camera and a second camera which is integrated with a drive system, the deviation amount from an origin position of the drive system is found, and the deviation amount from the driving shaft of the tip of the needle is found by the first camera by adding an additionally obtained deviation amount.