发明名称 ULTRAVIOLET IRRADIATION APPARATUS, AND IRRADIATION UNIT FOR THE ULTRAVIOLET IRRADIATION APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an ultraviolet irradiation apparatus, which rapidly makes an exchange of lamps and can easily obtain the desired illuminance and the desired illuminance distribution, and to provide the irradiation unit of the ultraviolet irradiation apparatus. SOLUTION: An ultraviolet irradiation apparatus is an ultraviolet irradiation apparatus for irradiating a work with ultraviolet rays, a lamp for radiating light including the ultraviolet rays and a mirror for reflecting light from the lamp are provided on a holding member, a guide part is provided within a light irradiation box of the apparatus, the holding member provided with the lamp and the mirror is housed within the light irradiation box along the guide part and is fixed within the box.
申请公布号 JP2002367874(A) 申请公布日期 2002.12.20
申请号 JP20010168923 申请日期 2001.06.05
申请人 USHIO INC 发明人 FUJIWARA YOSHINORI
分类号 H01L21/027;H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/027
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