METHOD FOR MANUFACTURING GLASS CERAMIC MULTILAYER SUBSTRATE AND GLASS CERAMIC MULTILAYER SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To securely manufacture a glass ceramic multilayer substrate to be flat and in a low burning contraction rate. SOLUTION: A raw laminate where first and second green sheets 2 and 3 showing mutually different burning contraction behaviors are laminated is burnt and the glass ceramic multilayer substrate 1 is manufactured. When the contraction start temperatures ( deg.C) of the first and second green sheets 2 and 3 in a burning process are set to be TSa and TSb , temperatures ( deg.C) becoming 90% of contraction quantity when the sintering of the first and second green sheet 2 and 3 is completed are set to be TFa and TFb , and a temperature rising rate to be X deg.C/min., the relation of (TFa +3X)