发明名称 SEMICONDUCTOR DEVICE HAVING FUSE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having fuses, which can be less influenced by the warpage of a wafer and can be made in high integration with a small fuse pitch. SOLUTION: An element formation region 30 surrounded by a dicing line region 50 is positioned on the surface of a semiconductor device. For example, a memory block 20 is positioned in the element formation region 30, and normal and redundant memory cells are formed within the memory block 20. A fuse box 1 is positioned in the vicinity of the memory block 20, and a plurality of fuses 1 are positioned within the fuse box 10. A focusing alignment mark 15 is positioned in the vicinity of the fuse box 10 or within the box 10.
申请公布号 JP2002368090(A) 申请公布日期 2002.12.20
申请号 JP20010170495 申请日期 2001.06.06
申请人 MITSUBISHI ELECTRIC CORP 发明人 MARUTA MASANAO
分类号 H01L21/82;H01L27/10;(IPC1-7):H01L21/82 主分类号 H01L21/82
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