发明名称 |
SEMICONDUCTOR DEVICE HAVING LDD-TYPE SOURCE/DRAIN REGION AND PRODUCTION METHOD THEREFOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device, having an LDD-type source/drain region, and to provide production method therefor. SOLUTION: This semiconductor device is provided with at least one pair of gate patterns, located on a semiconductor substrate and LDD-type source/ drain regions formed on the semiconductor substrate on both the sides of each of gate patterns, the semiconductor substrate having the gate patterns and the LDD type source/drain region is covered with a uniform etching block film, and each of LDD-type source/drain region is exposed by a contact hole which penetrate a layer insulating film and the etching block film. |
申请公布号 |
JP2002368128(A) |
申请公布日期 |
2002.12.20 |
申请号 |
JP20020129210 |
申请日期 |
2002.04.30 |
申请人 |
SAMSUNG ELECTRONICS CO LTD |
发明人 |
KIN DOKYO;KIM JIN-HO;HWANG BYUNG-JIN |
分类号 |
H01L21/336;H01L21/768;H01L21/8234;H01L21/8238;H01L21/8244;H01L27/092;H01L27/11;H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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