发明名称 SEMICONDUCTOR DEVICE HAVING LDD-TYPE SOURCE/DRAIN REGION AND PRODUCTION METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device, having an LDD-type source/drain region, and to provide production method therefor. SOLUTION: This semiconductor device is provided with at least one pair of gate patterns, located on a semiconductor substrate and LDD-type source/ drain regions formed on the semiconductor substrate on both the sides of each of gate patterns, the semiconductor substrate having the gate patterns and the LDD type source/drain region is covered with a uniform etching block film, and each of LDD-type source/drain region is exposed by a contact hole which penetrate a layer insulating film and the etching block film.
申请公布号 JP2002368128(A) 申请公布日期 2002.12.20
申请号 JP20020129210 申请日期 2002.04.30
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 KIN DOKYO;KIM JIN-HO;HWANG BYUNG-JIN
分类号 H01L21/336;H01L21/768;H01L21/8234;H01L21/8238;H01L21/8244;H01L27/092;H01L27/11;H01L29/78 主分类号 H01L21/336
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