| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe interface bushing which can effectively dissipate the heat resulting from RF power. SOLUTION: A probe interface for an RF probe head comprises a conductor for transmitting RF power to a plasma chamber, and a sensing board for generating an analog signal based on the RF power. An electrically insulative bushing is disposed between the conductor and the sensing board, where the bushing is thermally conductive such that the bushing dissipates the heat resulting from the RF power. By enabling the bushing to be thermally conductive, thermal instability is reduced and the overall RF power handing capacity is increased.
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