| 摘要 |
PROBLEM TO BE SOLVED: To provide a control method of inline processes for manufacturing a plurality of lots simultaneously by controlling the line without using a center process controller, and to provide a manufacturing method of semiconductor devices. SOLUTION: Each apparatus for composing inline processes counts the number of works carried in and out products, and allows the initial value of a carry-in counter to coincide with the total work stock tolerance 31 for the entire apparatus in the pre-process. When the difference between the count of the carry-out counter and the number of works 23 during treatment coincides with the initial value of the carry-in counter, a start signal A where the carry- out counter starts counting is outputted to the apparatus in the pre-process via an interface, thus achieving synchronization of a common counter of the carry-in and carry-out of the work among pieces of process apparatus, and hence controlling the number of works of the entire line without using a center process controller.
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