METHOD FOR FORMING IRIDIUM OXIDE THIN FILM, AND ITS APPLICATION

摘要

PROBLEM TO BE SOLVED: To form a fine and uniform Perovskite single-layer film containing lead having homogeneous surface morphology on an iridium oxide electrode film without interposing a platinum layer. SOLUTION: In a film formation method or its film-formed body, a seed layer is formed on the thin film of iridium oxide for crystallization, lead-based Perovskite type oxide is formed on it, and TiOx, PT, PZT, and the like are used as the seed layer.