| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of inspecting a thin dyestuff film which is capable of easily inspecting the state of the thin dyestuff film when the surface of a substrate formed with grooves at prescribed intervals is coated with the thin dyestuff film. SOLUTION: The correlation between the light intensity ratio of two beams of diffracted light varying in order selected form the diffracted light by the surface of the thin dyestuff film 204 formed on the substrate 202 formed with the grooves at the prescribed intervals and the physical quantity indicating the relation between the dyestuff film thickness in the groove sections and the dyestuff film thickness in the non-groove sections between the groove sections and the groove sections is previously determined; The light intensity of at least two beams of the diffracted light varying in the order of diffracted light by the surface of the thin dyestuff film 204 formed by coating on the substrate 202; the measured light intensity ratio of the light intensity of the diffracted light is calculated; and the state of the thin dyestuff film is inspected from the physical quantity corresponding to the calculated light intensity ratio based on the correlation previously determined. |
