| 摘要 |
PROBLEM TO BE SOLVED: To prevent overcharging by energy stored by a resonating inductance means, and to perform high-precision charging by a charger for charging storage capacitors, such as an excimer laser. SOLUTION: A semiconductor switch is turned off, when it is determined through computation that a charging capacity to an energy-storing capacitor by an inertia current which is produced by the magnetic energy of the resonating inductance means, after the semiconductor switch has been turned off, in a capacitor resonance charging circuit, is sufficient to charge the energy-storing capacitor up to the target charged voltage. |
