| 摘要 |
<p>A method is provided for testing or calibrating a pressure sensor of a number of pressure sensors placed in a wafer (10), whereby the pressure sensor has a pressure-sensitive section and a signal output. The method comprises a step involving the pressure-tight joining of the pressure-sensitive section of the pressure sensor to a fluid line (60), a step involving the application of a predetermined pressure onto the pressure-sensitive section of the pressure sensor via the fluid line (60), and a step involving the reception of a signal from the signal output of the pressure sensor.</p> |
