| 摘要 |
<p>An alignment tool, method and system are provided for aligning a robot blade and a cassette in a workpiece handling system, in which the tool comprises a frame or fixture adapted to emulate a plurality of different types of cassettes. The frame is adapted to be supported by a cassette handler system and includes a plurality of alignment and registration surfaces adapted to emulate corresponding alignment and registration surfaces of a cassette. A removable H bar may be attached to the frame in a plurality of selectable positions to emulate one or more of a plurality of different cassette H bar positions of different types of cassettes. A kit of selectable and removable rear guide rails permit one pair of rear guide rails to be substituted for another pair of rear guide rails to permit the frame to emulate the particular rear guide rail arrangement of a plurality of different cassettes.</p> |
