发明名称 |
ELECTRONIC PART COMPRESSION−BONDING APPARATUS AND METHOD |
摘要 |
Connection failure of an electronic part to be mounted on a board by thermocompression bonding is prevented by accurately controlling the expansion of the electronic part. An electronic part compression−bonding apparatus comprises a compression−bonding unit (41) for thermocompression−bonding an electronic part on a board, a pressure supply unit (48), a pressure control unit (83) for controlling the pressure, a heating unit (43) for heating the compression−bonding unit (41), a temperature control unit (85), and a thermocompression−bonding control unit (80) for controlling the pressure control unit (83) and the heating unit (43) according to thermocompression−bonding condition data including the pressure and heating temperature at least one of which is variably set during the step from the start to end of the thermocompression−bonding of the electronic part. The thermocompression−bonding condition data is set to a first pressure at a first substep of the thermocompression−bonding step and to a second pressure lower than the first pressure at a second substep subsequent to the first step. |
申请公布号 |
WO02101815(A1) |
申请公布日期 |
2002.12.19 |
申请号 |
WO2002JP05697 |
申请日期 |
2002.06.07 |
申请人 |
SHIBAURA MECHATRONICS CORPORATION;OGIMOTO, SHINICHI;MORITA, KOJI |
发明人 |
OGIMOTO, SHINICHI;MORITA, KOJI |
分类号 |
B23K20/02;(IPC1-7):H01L21/60 |
主分类号 |
B23K20/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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