| 摘要 |
A z-movement detector utilises an optical interferometer with a laser diode as a light source (301) and an optical interference detector (302) which detects changes in the speckle pattern of the light from the laser as a result of movements of a target (307) in the z-direction. Key element of the interferometer is the use of a single block of glass (318) which physically integrates the beam splitting functions and some of the reflection functions of the interferometer.
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