发明名称 Mosfet device and fabrication method thereof
摘要 A MOSFET device includes a gate formed on a multi-surface area of a semiconductor substrate formed of a first surface which is not etched, a second surface etched in parallel with the first surface, and a surface connecting the first and second surfaces. A source/drain region is formed below each of the first and second surfaces laterally adjacent to a gate prevailed on the matter surface. A first contact is formed of a conductive material formed on an upper surface of the source/drain region, and a second contact is formed of a conductive material formed on the gate, so that it is possible to prevent a punch through phenomenon, increase the integrity of the device, and decrease the contact resistance of a contact formed on the gate.
申请公布号 US2002192890(A1) 申请公布日期 2002.12.19
申请号 US20020226357 申请日期 2002.08.23
申请人 HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. 发明人 PARK SEONG-JO;SUNG YANG-SOO
分类号 H01L21/8234;H01L21/8242;H01L27/108;H01L29/78;(IPC1-7):H01L21/823 主分类号 H01L21/8234
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