发明名称 Mass flow rate-measuring method and mass flow rate control apparatus
摘要 The real mass flow rate is calculated for a variety of gases. The variety of gases are classified into a plurality of classifications, and representative discharge coefficients are previously determined for the respective classifications. When an upstream pressure and a temperature are detected for a certain gas on an upstream side of the sonic nozzle, a theoretical mass flow rate is calculated. After the theoretical mass flow rate is calculated, reference is made to a theoretical mass flow rate-discharge coefficient correspondence table recorded in a memory corresponding to the classification of the gas to select a desired discharge coefficient. After the discharge coefficient is selected, a real mass flow rate is determined with a product of the selected discharge coefficient and the theoretical mass flow rate.
申请公布号 US2002193911(A1) 申请公布日期 2002.12.19
申请号 US20020167598 申请日期 2002.06.13
申请人 SMC KABUSHIKI KAISHA 发明人 HORIUCHI TORU;SHINOZAKI KENJI
分类号 G01F1/34;G01F1/00;G01F1/42;G01F1/50;G01F15/04;G01F25/00;G05D7/06;(IPC1-7):G05D7/00 主分类号 G01F1/34
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