| 摘要 |
<p>Systems, methods and computer program products are p∩vided for calibrating integrated the inspection tools of one or more processing tools. In a first aspect, a system is provided that includes (1) a processing tool adapted to process substrates; (2) an integrated inspection tool coupled to the processing tool; and (3) a controller dapted to communicate with the integrated inspection tool. The controller includes computer program code adapted to receive a first result generated by inspecting a production substrate with a stand-alone inspection tool, and to receive a second result generated by inspecting the production substrate with the integrated inspection tool. The computer controller further includes computer program code adapted to calibrate the integrated inspection tool based on the first and second results. Numerous other systems are provided, as are methods and computer program products.</p> |
