MEGASONIC CLEANER AND DRYER SYSTEM

摘要

An apparatus for cleaning a substrate (114) includes a bearing assembly (162), a tubular shaft (166), a substrate support (110), a process bowl (106), and a dispenser (171). The tubular shaft (166) has an upper end and a lower end. The lower end is rotatably mounted to the bearing assembly (162). The shaft (166) provides an area (168) through which cleaning liquid can be directed. The substrate support (110) has a lower region connected to the tubular shaft (166) and an upper region that supports the substrate (114). The process bowl (106) surrounds and is spaced outwardly from the substrate support (110). The process bowl (106) has a slot in an outer wall that receives a robot arm that positions the substrate (114) on the substrate support (110) and that withdraws the substrate (114) from the substrate support (110). The dispenser (171) has an outlet that directs liquid through the area (168), toward the upper region. The dispenser (171) is positioned beneath the upper region.