Plasma display panel with a low k dielectric layer

摘要

A plasma display panel including a low k dielectric layer. In one embodiment, the dielectric layer is comprises a fluorine-doped silicon oxide layer such as an SiOF layer. In another embodiment, the dielectric layer comprises a Black Diamond(TM) layer. In certain embodiments, a capping layer such as SiN or SiON is deposited over the dielectric layer.