发明名称 MULTI-BEAM MICRO-MACHINING SYSTEM AND METHOD
摘要 <p>A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.</p>
申请公布号 WO2002101888(A2) 申请公布日期 2002.12.19
申请号 IL2002000461 申请日期 2002.06.13
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