摘要 |
PROBLEM TO BE SOLVED: To eliminate a focus point at the boundary of light reception elements. SOLUTION: A displacement measuring sensor 1 comprises a projector 2 for casting measuring light to a measuring object W, and a light receiver 5 containing a light receiving element 8 having a light receiving region 8a and a focusing lens 7 forming reflection light on the light receiving region 8a as a focal point P, and a light receiving lens 6 for condensing the reflection light in parallel and emitting to the focusing lens 7. The displacement measuring sensor 1 is a sensor for measuring by noncontact, the displacement of the measuring object W from the position of the focal point P moving on the light receiving region 8a according to the light path variation with the displacement of the measuring object W. The displacement measuring sensor 1 is provided in between the light receiving lens 6 and the focusing lens 7 and provided with a light quantity control means 10 for varying the transmission light quantity of measuring light following the incident angle of the reflection light varying with the displacement of the measuring object W, and reducing the transmission light quantity as the focal point P approaches the boundary B1 and B2 of the light receiving region 8a in its moving direction X1 and X2 sides.
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