| 摘要 |
PURPOSE: A method for controlling an interlock of a photo spinner is provided to minimize losses of a wafer by analyzing an alarm. CONSTITUTION: A coating step of a photo spinner is performed(100). By sensing an abnormal signal, an alarm is generated(110). When the alarm is generated, the controller is determined whether the wafer is normal by analyzing the abnormal signal(120). If the wafer is abnormal, the processing is stopped by interlocking the coating step(130-140). Then, an worker takes immediate action(150) and removes the alarm(160). If the wafer is normal, the processing is normally performed(170).
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