TEMPERATURE SENSING RESISTANCE ELEMENT, AND THERMAL FLOW SENSOR USING IT

摘要

PROBLEM TO BE SOLVED: To provide a temperature sensing resistance element of improved reliability and durability in the temperature sensing resistance element of high resistance used for a thermal flow sensor, and the thermal sensor with excellent reliability and measuring precision using the temperature sensing resistance element. SOLUTION: This temperature sensing resistance element is provided with a cylindrical base 3, a temperature sensing resistance 2 formed spirally in an outer circumferential face of the base 3 and comprising a platinum film band for communicating both end parts of the base 3, and a conducting member 4 connected electrically to the resistance 2 and projected from the both end parts of the base 3. A interband width W of the adjacent platinum film band in the temperature sensing resistance 2 is 40μm or more.