SUPPORT DEVICE OF REFERENCE PLATE FOR LIGHT WAVE INTERFEROMETER

摘要

PROBLEM TO BE SOLVED: To prevent addition of a force causing deformation of a reference plate affecting measurement because of thermal expansion difference between a support member and the reference plate during temperature variation, and prevent elastic vibration caused by a support device during light axis direction movement of the reference plate, in a case that the outer surface of the reference plate is supported by way of the support member. SOLUTION: The support device 10 comprises the annular support member 11 surrounding the outer surface of the reference plate 16. On the support member 11, a plurality of notches 14 extending from one end to the other end in vertical direction are formed. Each notch 14 is formed to have reverse direction from the neighboring ones one another and glue injection holes 12 are punched in between the notches 14. The support member 11 is bonded on the outer surface of the reference plate 16 with glue injected in each glue injection hole 12. The reference plate 16 is attached to an interferometer body or a shell for the reference plate by way of the support member 11.