APPARATUS FOR SEPARATING AND RECOVERING PERFLUORO COMPOUND GAS

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for separating and recovering a perfluoro compound gas by which the perfluoro compound gas can more efficiently be separated and recovered. SOLUTION: This apparatus is equipped with a first to a third membrane separating means 2-4 for separating the perfluoro compound gas in a gas mixture, a permeated gas returning passage 5 for feeding the resultant permeated gases from the membrane separating means 3 and 4 to the upstream side of the first membrane separating means 2, a permeated gas membrane separating means 6 for separating the perfluoro compound gas in the permeated gas from the first membrane separating means 2 and an unpermeated gas returning passage 7 for feeding the unpermeated gas from the membrane separating means 6 to the upstream side of the first membrane separating means 2.