发明名称 |
METHOD OF ANALYZING A SOLID SURFACE FROM PHOTON EMISSIONS OF SPUTTERED PARTICLES |
摘要 |
Identification of unknown constituents and their relative concentrations in a solid surface is made by bombarding the solid surface with an ion or molecule beam having low energy and low density, so as to achieve the sputtering of excited particles directly from the surface and resultant photon emissions characteristic of the sputtered particles.
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申请公布号 |
US3644044(A) |
申请公布日期 |
1972.02.22 |
申请号 |
USD3644044 |
申请日期 |
1970.05.20 |
申请人 |
BELL TELEPHONE LABORATORIES INC. |
发明人 |
NORMAN HENRY TOLK;CLARK WOODY WHITE |
分类号 |
H01J37/252;(IPC1-7):H01J37/26;G01J3/30 |
主分类号 |
H01J37/252 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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