| 摘要 |
PURPOSE: An apparatus for extracting a tray is provided to perform continuously fabrication processes by stacking sequentially trays and moving the trays to a place for extracting the stacked trays. CONSTITUTION: A couple of long slots(31,32) are formed on a table(30). A plurality of guide bars(33) are installed at edges of the table(30). A driving portion(20) is installed at a frame(11). The driving portion(20) is formed with a guide rail(21) and a cylinder(22). The guide rail(21) includes the first guide member(21b) and the second guide member(21c). A couple of elevation members(41,42) are installed at an upper portion of the table(11). The elevation members(41,42) are elevated by an elevation portion. The elevation portion is formed with an arm, a couple of guide bars(53), a ball screw(54), and a transfer member(55). The ball screw(54) is rotated by a motor(56). A subordinate pulley(57) is installed at a lower end portion of the ball screw(54). A driving pulley(58) is connected with a rotary shaft of the motor(56). An upper frame(60) having an opening(61) is installed on upper portions of the transfer members(41,42). A guide portion(62) can be installed at an edge of the opening(61).
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