发明名称 |
POLISHING SHEET AND METHOD OF MANUFACTURING THE POLISHING SHEET |
摘要 |
PROBLEM TO BE SOLVED: To provide a polishing sheet not deformed with the elapse of time in use and capable of uniformly smoothening the surface of a polishing object at a high polishing rate and a method of manufacturing the polishing sheet. SOLUTION: This polishing sheet 10 comprises a fabric sheet 12 formed of a piece of fiber 13, a fiber bundle 13 formed by binding a plurality of pieces of fibers, or a fiber bundle 13 formed by further binding several bundles formed by bundling the plurality of fibers and resin 14 for fixing the fibers or fiber 13 bundles of the fabric sheet to each other. The polishing sheet 10 is fixed to the surface of a lining sheet 15. The number of satins is desirably within the range of 3 to 15. |
申请公布号 |
JP2002361564(A) |
申请公布日期 |
2002.12.18 |
申请号 |
JP20010208559 |
申请日期 |
2001.06.06 |
申请人 |
NIHON MICRO COATING CO LTD |
发明人 |
OI HISATOMO;IZUMI TOSHIHIRO;KOBAYASHI TOSHIHIRO |
分类号 |
B24B21/00;B24B37/20;B24B37/24;B24D3/28;B24D11/00;B24D11/02;B24D13/14;D03D15/00 |
主分类号 |
B24B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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