| 摘要 |
PROBLEM TO BE SOLVED: To achieve a sensor structure capable of improving the yield, while suppressing vibration in the direction different from the two axial directions, in a capacitive acceleration sensor having a movable electrode displacing depending on the application of acceleration and a fixed electrode facing the movable electrode having a detection space and capable of detecting the acceleration generated in the two axial directions. SOLUTION: A first and a second sensor chips 100 and 200, respectively, form comb like beam structural bodies having movable electrodes 120 and 220 and fixed electrodes 130, 140, 230 and 240 on a semiconductor substrate 10. Both sensor chips 100 and 200 are laminated on one circuit board 300, such that displacement direction X of the movable electrode 120 of the first sensor chip 100 is orthogonal to displacement direction Y of the movable electrode 220 of the second sensor chip 200. |
