| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration removing device that removes a disturbance and eliminates characteristic dispersion of each air spring. SOLUTION: The vibration removing device has the air spring 2, a servo valve 3 for controlling pressure in the air spring, a pressure sensor 4 for detecting the pressure in the air spring, a vibration-removing table 1 supported by the air spring, and a displacement sensor 6 for detecting displacement of the vibration-removing table, and suppresses displacement and vibration of the vibration-removing table. A disturbance applied to the air spring is estimated from an input signal u to the servo valve, a detection signal p from the pressure sensor and a detection signal x from the displacement sensor, and the servo valve is controlled so as to suppress the disturbance.
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