发明名称 Semiconductor device manufacturing method
摘要 According to the invention, the characteristics of semiconductor devices are measured while these devices are adhered to an adhesive sheet, and the semiconductor devices, at this time, are aligned in a predetermined manner. Further, a semiconductor device is captured in the field of view of a camera to identify its location, and the characteristics of semiconductor devices, which are adjacent to the semiconductor device, are measured, without a position recognition process being required for these devices. Consequently, a considerable reduction in working time is realized and is accompanied by an improvement in productivity.
申请公布号 US6495379(B2) 申请公布日期 2002.12.17
申请号 US20010911924 申请日期 2001.07.24
申请人 SANYO ELECTRIC CO., LTD. 发明人 IKETANI KOJI
分类号 G01R31/26;G01R1/06;G01R31/28;H01L21/301;H01L21/56;H01L21/66;H01L21/68;H01L23/28;H01L23/31;(IPC1-7):G01R31/76 主分类号 G01R31/26
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