Inductive coil assembly having multiple coil segments for plasma processing apparatus

摘要

An inductive coil assembly for plasma processing apparatus includes a coil and an external screen. The coil is constituted by a plurality of coil portions each including an inductive segment. The assembly also includes respective connectors for connecting each portion in parallel with the others and to an RF source. The connectors are configured such that the current flowing in any part of the coil other than the segments is balanced by current flowing in an opposite sense in an adjacent part.