发明名称 |
Thermal infrared array sensor for detecting a plurality of infrared wavelength bands |
摘要 |
An infrared array sensor having an array of infrared sensors of different plural types for detecting infrared rays of different plural wavelength bands. Each sensor includes a diaphragm separated from a substrate by a thermally insulating cavity. The heighths of one of the diaphragm and the cavity are different in each of the plural types of sensors.
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申请公布号 |
US6495829(B1) |
申请公布日期 |
2002.12.17 |
申请号 |
US20000481678 |
申请日期 |
2000.01.12 |
申请人 |
NEC CORPORATION |
发明人 |
ODA NAOKI |
分类号 |
G01J1/02;G01J5/00;G01J5/02;G01J5/20;H01L27/14;H01L27/146;H01L31/08;(IPC1-7):G01J5/02 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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