发明名称 Electro-plating apparatus and method
摘要 A single delivery channel is formed by, and between, inner wall 2 and baffle 3. Electrolyte 5 is pumped up the interior of channel 1 and is directed onto substrate 4 being a cathode maintained at -10 volts. The upper part of the inner wall 2 of channel 1 forms the anode such that electrote is forced between the substrate and the upper horizontal surface of the anode 6. A second baffle 7 is provided in order to assist in collecting and removing electrolyte 5 after impingement with substrate 4, possible for re-use. Contact between the electrolyte 5 and substrate 4 is optimised by providing the electrolyte with a swirling motion as it passes up channel 1. Anode 6 is a solid conducting bar 10, alternatively it is formed of solid rods 11 nor tubes 12.
申请公布号 US6495018(B1) 申请公布日期 2002.12.17
申请号 US20000525586 申请日期 2000.03.15
申请人 TECHNOLOGY DEVELOPMENT ASSOCIATE OPERATIONS LIMITED 发明人 LOWE JOHN MICHAEL
分类号 C25D5/02;C25D5/08;C25D7/12;C25D17/00;C25D17/12;C25D21/00;C25D21/12;(IPC1-7):C25D21/12;C25D5/16 主分类号 C25D5/02
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